High reflectivity high-Q micromechanical Bragg mirror
- Author(s)
- Hannes Böhm, Sylvain Gigan, Florian Blaser, Anton Zeilinger, Markus Aspelmeyer, Gregor Langer, Dieter Bäuerle, Jared B. Hertzberg, K C Schwab
- Abstract
The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 104. Using this micromirror in a Fabry-PŽrot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high- Q high-finesse cavities on chip. Œ 2006 American Institute of Physics.
- Organisation(s)
- External organisation(s)
- Johannes Kepler Universität Linz, University of Maryland, College Park
- Journal
- Applied Physics Letters
- Volume
- 89
- No. of pages
- 3
- ISSN
- 0003-6951
- DOI
- https://doi.org/10.1063/1.2393000
- Publication date
- 2006
- Peer reviewed
- Yes
- Austrian Fields of Science 2012
- 103008 Experimental physics
- Portal url
- https://ucris.univie.ac.at/portal/en/publications/high-reflectivity-highq-micromechanical-bragg-mirror(85f66a01-3c10-4e09-92db-18ae22dcda1e).html